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Conference title: 3rd International Conference on Ion Implantation Equipment and Techniques
Related conference title(s): Ion Implantation Equipment and Techniques
Location: Kingston, Canada
Date: 8 - 11 Jul 1980
Imprint: 1981

McKenna, Charles M ; Scanlon, Patrick J ; Winnard, James R

Published in: Nucl. Instrum. Methods Phys. Res.
Date of publication: 1981
Year: 1981
Vol.: 189    Num./Issue: 1


Note: Ion Implantation Equipment and Techniques

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 Record created 2010-12-16, last modified 2013-11-12



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