Investigation of silicon sensor quality as a function of the ohmic side processing technology


Bloch, P. (CERN) ; Peisert, A. (CERN) ; Cheremukhin, A. (Dubna, JINR) ; Golutvin, I. (Dubna, JINR) ; Zamyatin, N. (Dubna, JINR) ; Golubkov, S. (Zelenograd, Research Prod. Assoc.) ; Egorov, N. (Zelenograd, Research Prod. Assoc.) ; Konkov, K. (Zelenograd, Research Prod. Assoc.) ; Kozlov, Yu. (Zelenograd, Research Prod. Assoc.) ; Sidorov, A. (Zelenograd, Research Prod. Assoc.)

Published in: IEEE Trans.Nucl.Sci.
Year: 2002
Vol.: 49
Page No: 321-325

Web-Page: http://dx.doi.org/10.1109/TNS.2002.998662

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